The PPI3300 is a device for detecting surface defects such as scratches, ink smears, probe marks, watermarks, and chip edge cracks on 8-inch and 12-inch patterned wafers. The system uses a 26.1-megapixel high-speed CMOS camera and a CoaXPress interface. The combination of 5120 x 5120 high resolution, 90 FPS and global shutter creates a new standard for inspection applications. The use of CF objectives extends the working distance while maintaining a high numerical aperture, resulting in clear and sharp images with high contrast and resolution. The wafer inspection station has a rotary table and an anti-vibration platform integrated to provide accurate and high throughput inspection. Autoloading, wafer ID readers, and automatic defect inspection are all part of the standard system configuration.
 
Main features​
26.1 million pixel area scan color camera
Brightfield detection
Laser auto focus system
Nikon High Power Metallurgical Microscope
Rotary table for vacuum suction cups
Anti-vibration platform
1x Hirata FOUP port
Hirata ATM robot with end effector
Hirata Wafer Aligner
WID120 Wafer ID Reader
HEPA/ULPA FFU (optional