The WSS2150W Wafer Weight Handling System allows the weight of each wafer to be determined before sorting it into a small number of clamshell or half-height open cassettes, and it is designed in a 6-inch size. Wafers are transferred from open cassettes to clamshells for spin-rinse-dry (SRD) process. Determine the weight of each wafer in the clamshell for pre-roughing, wafers are sorted into clamshell/open cassettes according to their range of weight loss. After repeating the SRD process, all wafers will be transferred back to the open cassette once all wafers reach the required weight.
WSS2150W Wafer Weight Measurement and Handling System
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Designed for 6-inch wafer
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Mettler-Toledo (Mettler Toledo) high precision weigh module, WXT series with custom designed housing.
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Hirata 4-axis dual-arm ATM robot arm
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IOSS WID120 OCR reader integrated into Hirata pre-aligner module for 6" wafers
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3 workcells with 4 load ports (LP1 for Peek cassettes, LP2, LP3 and LP4 in common design, accept clamshell or half-height open cassettes, and are convertible.)_d04a07d8-9cd1- 3239-9149-20813d6c673b_
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Touch screen HMI with custom software for weight sorting
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TCP/IP network interface or SECS/GEM data communication (optional)
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