The WSS2200B is designed with four standard load ports to support 6-inch and 8-inch size wafers. The ports are designed to handle 6" SEMI standard open cassettes and 8" SEMI standard open cassettes. During the wafer sorting process, the robotic arm moves to the designated input load port for the wafer loading process. Movement in the X, Y, and Z axes is controlled by a Hirata robotic arm controller. The wafer loaded from the input load port is transferred to the pre-aligner for wafer orientation check and the aligned wafer ID is read by OCR and recorded to PC/server via TCP/IP or SECS/GEM. Wafers are transferred from the input loadport to the output loadport via recipe control.
WSS2200B Wafer Handling System
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Designed for 6" and 8" SEMI standard open cassettes with four load ports
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Dual Arm Hirata Automatic Wafer Loader/Unloader (Robot) with Built-in Wafer Mapping Sensor
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Wafer pre-aligner for orientation check and wafer alignment, and programmable wafer ID reader
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Programmable Wafer Sorting Recipe and Robot Controller
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Programmable sorting methods such as wafer ID sort, sequential sort, slot-to-slot sort, drag-and-drop sort, and sublot sort
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TCP-IP, RS232_81905-5CDE-3194-BB3B-136BAD5CF58D_ data interface and _cc781905-5cde-3194-BB3B-136bad58d_SECS GEM_CDE-3194-BB3B3B3B3B3B3B3B3B3B3B3B3B3B3B3B3B3B3B3B3B3B3B3B3B3B3B3B3B3B3B3-1. 6bad5cf58d_ interface (optional)
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