The WTS300G is designed to transfer, split, merge or flip 6-inch wafers and 8-inch wafers from an input cassette in batch mode. The input cassette types are SEMI standard open cassettes with 26 slots, 25 slots and 13 slots. It consists of four loadports, three of which are input loadports and one is an output loadport. The system is equipped with high-precision reflective sensors for detecting wafer protrusion.
WTS300G Wafer batch handling system
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Designed for 6-inch and 8-inch wafers
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Four load ports are available for wafer sorting of open cassettes placed vertically
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Motorized gripper module with 25 slot combs for wafer transfer, splitting, merging and flipping processes
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Equipped with reliable cassette mapping sensors, wafer protrusion sensors and cassette placement sensors.
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Product recipes are managed by user friendly GUI software
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TCP/IP network, used to interface with the host map server and store map data through the network
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SECS/GEM communication tool (optional)
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